Distinct from conventional diaphragm-type pressure sensors, a bulk-type silicon-based pressure sensor is proposed and demonstrated. External hydrostatic pressure acting on the sensor is converted to biaxial compression inside an all-silicon encapsulated vacuum cavity, and measured using four piezoresistors oriented to optimally utilize the anisotropy of silicon piezoresistance. Limited only by the test setup but intrinsically capable of a much higher pressure rating, the sensor has been tested to 120 MPa (around 1200 atmospheres). Containing no fragile movable micro-structures and constructed almost entirely of silicon using conventional micro-fabrication techniques, the self-contained sensor is robust and potentially low-cost.
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4.0 国际许可协议进行许可。
CSTR:11738.14.NCDC.XDA14.PP5651.2024
10.1109/TRANSDUCERS.2017.7994493