A Bulk-Type Pressure Sensor with Full-Bridge Implementation Enabled by Stress-Modifying Trenches
发布时间：2024-01-08
元数据
名 称
A Bulk-Type Pressure Sensor with Full-Bridge Implementation Enabled by Stress-Modifying Trenches
科技资源标识
CSTR:11738.14.NCDC.XDA14.PP6155.2024
DOI
10.1109/MEMS49605.2023.10052520
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摘 要
Incorporating a half Wheatstone bridge consisting of two sensing piezoresistors and two relatively constant reference resistors to measure the biaxial compression induced by a hydrostatic pressure load, a bulk-type, dual-cavity pressure sensor exhibiting a sensitivity of 200 µV/V/MPa over a pressure range of 200 MPa has been reported. Presently described is a similar sensor further incorporating stress-modifying trenches in its cavity-sandwiched sensing plate. With all four piezoresistors being active and aligned to orientations with stress components exhibiting opposite signs, a full Wheatstone bridge can be realized. This leads to a significant 150% increase in the sensitivity of the pressure sensor to 513 µV/V/MPa over the same pressure range. Moreover, the resulting sensor can now be implemented on a more readily available (001) silicon substrate.
林德泉,王文,周显良. A Bulk-Type Pressure Sensor with Full-Bridge Implementation Enabled by Stress-Modifying Trenches. 国家冰川冻土沙漠科学数据中心(http://www.ncdc.ac.cn), 2024. https://cstr.cn/CSTR:11738.14.NCDC.XDA14.PP6155.2024.
林德泉,王文,周显良. A Bulk-Type Pressure Sensor with Full-Bridge Implementation Enabled by Stress-Modifying Trenches. 国家冰川冻土沙漠科学数据中心(http://www.ncdc.ac.cn), 2024. https://www.doi.org/10.1109/MEMS49605.2023.10052520.
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CSTR:11738.14.NCDC.XDA14.PP6155.2024
10.1109/MEMS49605.2023.10052520